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Precision Optics for Semiconductor Inspection

 Whether you are developing a next‑generation semiconductor inspection tool or optimizing an existing platform, we're the partner that companies trust to deliver the optical expertise and manufacturing discipline required to meet your performance goals. 

High‑Resolution Optics for Wafer Inspection, Metrology, and Machine Vision

Semiconductor inspection systems demand exceptional image quality, stability, and repeatability. At LaCroix, we manufacture custom precision optics and imaging assemblies that support high‑resolution semiconductor inspection, wafer inspection, and machine vision applications—from early‑stage development through production programs.

With vertically integrated design, fabrication, coating, assembly, and inspection metrology, we help inspection equipment manufacturers reduce risk and maintain consistent optical performance at scale.

 

Semiconductor Inspection Applications

Our optics support inspection platforms where optical accuracy directly impacts yield and process control, including:

  • Wafer surface and defect inspection
  • Critical dimension (CD) and pattern inspection
  • Advanced packaging inspection
  • Semiconductor metrology and machine vision subsystems

Precision Optical Capabilities for Inspection Systems

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Custom Optics Manufactured to Tight Tolerances

We manufacture a broad range of optics commonly used in semiconductor inspection systems. All optics are engineered with a focus on form accuracy, surface quality, and repeatability critical to inspection performance. 
See all custom optics types
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High Precision Lens Assemblies

Our capabilities in high‑precision optical assemblies for semiconductor inspection tools support both prototype and production needs.
  • Optical and opto‑mechanical engineering
  • Precision mounting and alignment
  • Optical testing and verification

Through an integrated approach, we ensure inspection optics perform as intended from design through deployment.

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Optical Coatings for Semiconductor Inspection

We have in‑house optical coating capabilities that support inspection performance across UV, visible, and SWIR wavelengths, including:

  • Anti‑reflective (AR) coatings to maximize signal throughput
  • High‑reflectivity coatings and beam splitters
  • Custom coating designs matched to inspection requirements 
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Inspection Metrology & Quality Assurance

Quality is built into every optical component we manufacture through continuous inspection metrology, including interferometry, dimensional measurement, and optical verification. We align with industry-specific qualifications, supporting the quality and documentation expectations of semiconductor equipment programs.

  • ISO 9001:2015 certified
  • ITAR compliant
A partner you can trust

Learn why LaCroix is the right partner for your process.

Connect with our engineers to discuss your semiconductor inspection optics needs, and get a clear vision for how we can help you enhance quality control. 

Let's talk semiconductor needs.

  • Vertically integrated design–build–test capabilities

  • Scalable manufacturing from prototypes to production

  • Precision optics and assemblies manufactured in the USA

  • Relationship‑driven engineering support